Actuator device and mirror drive device

ABSTRACT

A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.

TECHNICAL FIELD

The present invention relates to an actuator device and a mirror drivingdevice.

BACKGROUND ART

Known actuator devices include a support portion, a movable portion witha coil thereon, a magnetic field generating portion is configured to leta magnetic field be exerted on the coil, and torsion bar portions onwhich wiring connected to the coil is disposed and that couple themovable portion to the support portion so as to be swingable (e.g., cf.Patent Literature 1). The torsion bar portions .are of a meanderingshape including a plurality of straight sections and a plurality ofturnover sections. The plurality of straight sections extends in a firstdirection along a swing axis of the torsion bar portions and isjuxtaposed in a second direction intersecting with the first direction.The plurality of turnover sections alternately couples two ends of theplurality of straight sections.

CITATION LIST Patent Literature

Patent Literature 1: Japanese Unexamined Patent Publication No.2012-088487

SUMMARY OF INVENTION Technical Problem

An object of the present invention is to provide an actuator device anda mirror driving device capable of achieving reduction in resistance ofthe wiring and preventing the wiring from inhibiting swing motion of themovable portion.

Solution to Problem

The Inventors conducted investigation research and found the new fact asdescribed below.

When the torsion bar portions are of the aforementioned meanderingshape, the wiring disposed on the torsion bar portions includes wiringsections disposed on the respective turnover sections and wiringsections connected to the foregoing wiring sections and disposed on therespective straight sections. The wiring sections disposed on theturnover sections have higher resistance than the wiring sectionsdisposed on the straight sections, because of their shape. For thisreason, the wiring sections disposed on the turnover sections have highresistance in the entire wiring. With high resistance of wiring, thewiring generates heat and it becomes difficult to ensure a sufficientamount of electric current to be supplied to the coil. If the sufficientamount of electric current to the coil is not ensured, a swing range ofthe movable portion decrease.

By adopting a configuration in which the wiring is damascene wiring madeof copper (Cu), it is possible to significantly decrease the totalresistance of the wiring disposed on the torsion bar portions. However,when the wiring is the damascene wiring made of Cu, the wiring mayinhibit the swing motion of the movable portion.

In the case of the torsion bar portions of the meandering shape asdescribed above, when the movable portion swings around the swing axisof the torsion bar portions, high stress is exerted on the straightsections extending in the first direction along the swing axis of thetorsion bar portions. For this reason, for example, when the movableportion swings in one direction around the swing axis of the torsion barportions, the high stress is exerted on the damascene wiring of Culocated on the straight sections, so as to cause plastic deformation ofthe damascene wiring of Cu itself. In the plastic deformation state ofthe wiring (damascene wiring), the movable portion could fail to returnto an initial position, or, the movable portion could be subjected tomechanical resistance during swing motion in the direction opposite tothe foregoing one direction around the swing axis of the torsion barportions.

The Invertors conducted elaborate research on configurations capable ofachieving reduction in resistance of the wiring and preventing thewiring from inhibiting the swing motion of the movable portion.

As a result of the research, the Inventors have come to discover aconfiguration capable of suppressing the plastic deformation. of thewiring sections located on the straight sections. In this configuration,the wiring sections disposed on the straight sections where the highstress is exerted on are not the damascene wiring Made of Cu, but theyare wiring made of a metal material more resistant to plasticdeformation than Cu,

The Inventors focused on the point that the stress exerted on theturnover sections is lower than that on the straight sections. TheInventors have come to consider that the resistance of the wiring couldbe reduced by adopting a configuration in which the wiring sectionsdisposed on the turnover sections were the damascene wiring made of Cu.The wiring sections disposed on the turnover sections have relativelyhigh resistance because of their shape, as described above. For thisreason, when the wiring sections disposed on the turnover sections arethe damascene wiring made of Cu, the resistance of the wiring can bekept low.

An actuator device according to one aspect of the present inventionincludes a support portion, a movable portion on which a conductor isdisposed, and a torsion bar portion on which wiring connected to theconductor is disposed and that couples the movable portion to thesupport portion so as to be swingable. The torsion bar portion is of ameandering shape including a plurality of straight sections extending ina first direction along a swing axis of the torsion bar portion andjuxtaposed in a second direction intersecting with the first direction,and a plurality of turnover sections alternately coupling two ends ofthe straight sections. The wiring includes first wiring sectionsdisposed on the respective turnover sections and second wiring sectionsconnected to the first wiring sections and disposed on the respectivestraight sections. The first wiring sections include damascene wiringsections that are disposed so as to be embedded in grooves formed in theturnover sections and that are made of a first metal material includingCu. The second wiring sections are disposed on the straight sections andare made of a second metal material more resistant to plasticdeformation than the first metal material.

In the actuator device according to the one aspect of the presentinvention, the first wiring sections disposed on the turnover sectionsinclude the damascene wiring sections made of the first metal materialincluding Cu. For this reason, it is feasible to achieve reduction inresistance of the wiring disposed on the torsion bar portion. The secondwiring sections disposed on the straight sections are made of the secondmetal material more resistant to plastic deformation than the firstmetal material. For this reason, the plastic deformation of the secondwiring sections is suppressed even in a situation where high stress isexerted on the straight sections. Therefore, it is feasible to preventthe wiring disposed on the torsion bar portion from inhibiting the swingmotion of the movable portion.

The first wiring section may further include a section that is disposedon the damascene wiring section so as to cover an opening of the grooveand that is made of the second metal material. In this case, theresistance of the first wiring section can be further reduced.

In the damascene wiring section, the corner edges located on the surfaceside of the turnover section may be locally thinned so as to reduce thesectional area because of steps in its manufacturing process. Thedecrease in sectional area of the damascene wiring section leads toincrease in resistance of the first wiring section. However, since thefirst wiring section includes the section disposed on the damascenewiring section so as to cover the opening of the groove, the increase inresistance of the first wiring section can be prevented even if thedamascene wiring section is thinned.

A connection point between the torsion bar portion and the supportportion and a connection point between the torsion bar portion and themovable portion may be located on a virtual line passing through acentral region in the second direction of the torsion bar portion andextending in the first direction.

The resonance frequency of the torsion bar portion is determined by thewidth of the torsion bar portion and the length in the first directionof the torsion bar portion. A conceivable configuration to decrease thestress exerted on the straight sections is to increase the number ofstraight sections. The straight sections are not juxtaposed in the firstdirection but juxtaposed in the second direction. For this reason, thereis no change in the length in the first direction of the torsion barportion, even with increase in the number of straight sections.Therefore, it facilitates design of the torsion bar portion for settingthe resonance frequency of the torsion bar portion to a desired value.

The torsion bar portion may further include a first connection sectionthat connects the support portion to one straight section locatedoutermost in the second direction out of the plurality of straightsections, and a second connection section that connects the movablesection to the other straight section located outer most in the seconddirection out of the plurality of straight sections, and the wiring mayfurther include third wiring sections that are connected to the firstwiring sections and that are disposed on the first and second connectionsections, respectively.

The third wiring sections may include damascene wiring sections that aredisposed so as to be embedded in grooves formed in the first and secondconnection sections, respectively, and that are made of the first metalmaterial. In this case, even though the wiring includes the third wiringsections, increase in resistance of the wiring is suppressed. As aresult, the reduction in resistance of the wiring can be surelyachieved.

The second metal material may include Al or an alloy containing Al. Inthis case, plastic deformation of the second wiring sections can besuppressed quite well.

The movable portion may include a first section to which the torsion barportion is coupled, and a second section supported on the first sectionso as to be swingable around a swing axis extending in a directionorthogonal to the swing axis of the torsion bar portion. In this case,the second section of the movable portion can be swung around each ofthe two orthogonal axes.

A coil as the conductor may be disposed on the movable portion, and theactuator device may further include a magnetic field generating portionis configured to let a magnetic field be exerted on the coil. In thiscase, the movable portion can be swung by letting an electric currentflow through the coil on which the magnetic field is exerted.

A mirror driving device according to one aspect of the present inventionis a mirror driving device including the foregoing actuator device and amirror disposed on the movable portion.

The mirror driving device according to the one aspect of the presentinvention can achieve reduction in resistance of the wiring disposed onthe torsion bar portion and can prevent the wiring disposed on thetorsion bar portion from inhibiting the swing motion of the movableportion, as described above.

Advantageous Effects of Invention

According to the above-described aspects of the present invention, theactuator device and the mirror driving device are provided as thosecapable of achieving the reduction in resistance of the wiring andpreventing the wiring from inhibiting the swing motion of the movableportion.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a perspective view showing a mirror driving device accordingto one embodiment of the present invention.

FIG. 2 is a top plan view of the mirror driving device shown in FIG. 1.

FIG. 3 is a drawing for illustrating a circuit in the mirror drivingdevice shown in FIG. 1.

FIG. 4 is a drawing for illustrating a configuration of a torsion barportion.

FIG. 5 is a drawing for illustrating a cross-sectional configurationalong the line V-V in FIG. 4.

FIG. 6 is a drawing for illustrating a cross-sectional configurationalong the line VI-VI in FIG. 4.

FIG. 7 is a drawing for illustrating a cross-sectional configurationalong the line VII-VII in FIG. 4.

FIG. 8 is a drawing for illustrating a cross-sectional configurationalong the line VIII-VIII in FIG. 4.

FIG. 9 is a drawing for illustrating a cross-sectional configurationalong the line IX-IX in FIG. 4.

FIG. 10 is a drawing for illustrating a cross-sectional configurationalong the line X-X in FIG. 4.

FIG. 11 is a drawing for illustrating a state of stress generated in thetorsion bar portion.

FIG. 12. is a drawing for illustrating a modification example of theconfiguration of wiring.

FIG. 13 is a drawing for illustrating the modification example of theconfiguration of wiring.

DESCRIPTION OF EMBODIMENTS

Embodiments of the present invention will be described below in detailwith reference to the accompanying drawings. It is noted that in thedescription the same elements or elements with the same functionalitywill be denoted by the same reference signs, without redundantdescription.

A configuration of a mirror driving device 1 according to the presentembodiment will be described with reference to FIGS. 1 to 3. FIG. 1 is aperspective view showing the mirror driving device according to thepresent embodiment. FIG. 2 is a top plan view of the mirror drivingdevice shown in FIG. 1. FIG. 3 is a drawing for illustrating a circuitin the Mirror driving device shown in FIG. 1.

As shown in FIGS. 1 to 3, the mirror driving device 1 includes anactuator device 2 and a mirror 3. The actuator device 2 includes amagnetic field generating portion 4, a support portion. 6, a movableportion 8, and a pair of torsion bar portions 10.

The mirror 3 is a light reflecting film constituting a metal thin film.The mirror 3 is of a circular shape on its planar view. A metal materialto be used for the mirror 3 can be, for example, aluminum (Al), gold(Au), or silver (Ag).

The magnetic field generating portion 4 is a flat plate of a rectangularshape. The magnetic field generating portion 4 includes a pair ofprincipal faces 4 a, 4 b (not shown). The magnetic field generatingportion 4 lets a magnetic field be exerted on the movable portion 8.Arrangement of magnetic poles adopted for the magnetic field generatingportion 4 is a Halbach array. The magnetic field generating portion 4 ismade, for example, of permanent magnets or the like.

The support portion 6 is a frame body with an outside contour of arectangular shape. The support portion 6 is disposed on the magneticfield generating portion 4 so as to be opposed to the principal face 4 athereof. The support portion 6 supports the movable portion 8 throughthe pair of torsion bar portions 10. The movable portion 8 is locatedinside the support portion 6. The movable portion 8 includes a firstmovable portion 81, a second movable portion 82, and a mirrorarrangement portion 83. In the present embodiment, the support portion6, movable portion 8, and torsion bar portions 10 are integrally formedand are made, for example, of silicon (Si).

The first movable portion 81 is located inside the support portion 6 andis a frame body of a flat plate shape with an outside contour of arectangular shape. The first movable portion 81 is coupled to thetorsion bar portions 10 and is disposed as separated from the supportportion 6. The first movable portion 81 is supported so as to beswingable on the support portion 6 through the pair of torsion barportions 10. Namely, the first movable portion 81 is supported so as tobe rotatable back and forth on the support portion 6 through the pair oftorsion bar portions 10. Each torsion bar portion 10 couples the firstmovable portion 81 to the support portion 6 so as to be swingable. Thefirst movable portion 81 includes a principal face opposed to themagnetic field generating portion 4, and a principal face 81 a that is aback side with respect to the foregoing principal face. Each torsion barportion 10 is of a meandering shape, as described below.

The second movable portion 82 is located inside the first movableportion 81 and is a frame body of a flat plate shape with an. outsidecontour of a rectangular shape. The second movable portion 82 isdisposed as separated from the first movable portion 81. The secondmovable portion 82 is supported so as to be swingable on the firstmovable portion 81 through a pair of torsion bar portions 14. Namely,the second movable portion 82 is supported so as to be rotatable backand forth on the first movable portion 81 through the pair of torsionbar portions 14. Each torsion bar portion 14 couples the second movableportion 82 to the first movable portion 81 so as to be swingable. Thesecond movable portion 82 also includes a principal face opposed to themagnetic field generating portion 4, and a principal face 82 a that is aback side with respect to the foregoing principal face as the firstmovable portion 81 includes. Each torsion bar portion 14 is of astraight shape and is located like an identical straight line. In thepresent embodiment, the torsion bar portions 14 are also formedintegrally with the support portion 6, movable portion 8, and torsionbar portions 10 and are made, for example, of Si.

A swing axis of the torsion bar portions 10 intersects with a swing axisof the torsion bar portions 14. In the present embodiment, the swingaxis of the torsion bar portions 10 is orthogonal to the swing axis ofthe torsion bar portions 14. Namely, a rotational axis of the torsionbar portions 10 intersects with a rotational axis of the torsion barportions 14. The second movable portion 82 is supported on the firstmovable portion 81 so as to be swingable around the swing axis extendingin the direction orthogonal to the swing axis of the torsion barportions 10.

The mirror arrangement portion 83 is located inside the second movableportion 82 and is of a circular shape. The mirror arrangement portion 83is integrated with the second movable portion 82 and swung integrallywith the second movable portion 82. The minor arrangement portion 83includes a principal face opposed to the magnetic field generatingportion 4 and a principal face 83 a that is a back side with respect tothe foregoing principal face. The mirror 3 is disposed on the principalface 83 a of the mirror arrangement portion 83.

The actuator device 2 (mirror driving device 1), as also shown in FIG.3, includes a coil 16 disposed on the first movable portion 81 and acoil 18 disposed on the second movable portion 82. The coil 16 isdisposed on the principal face 81 a side of the first movable portion81. The coil 18 is disposed on the principal face 82 a side of thesecond movable portion 82. In the present embodiment, the coil 16 isused as a conductor disposed on the first movable portion 81 and thecoil 18 is used as a conductor disposed on the second movable portion82.

The coil 16 is wound in a spiral form of multiple turns when viewed froma direction orthogonal to the principal face 81 a. One end of the coil16 is located outside the coil 16 and the other end of the coil 16inside the coil 16. One end of a lead conductor 16 a is electricallyconnected to an outside end of the coil 16. One end of a lead conductor16 b is electrically connected to an inside end of the coil 16.

The lead conductors 16 a, 16 b are disposed mainly on one torsion barportion 10 and extend from the first movable portion 81 to the supportportion 6. The other ends of the lead conductors 16 a, 16 b areelectrically connected to respective electrodes 17 a, 17 b disposed onthe surface of the support portion 6. The electrodes 17 a, 17 b areelectrically connected to an unshown control circuit or the like. Thelead conductor 16 a is grade-separated from the coil 16 so as to passabove the coil 16.

The coil 18 is wound in a spiral form of multiple turns when viewed froma direction orthogonal to the principal face 82 a. One end of the coil18 is located outside the coil 18 and the other end of the coil 18inside the coil 18. One end of a lead conductor 18 a is electricallyconnected to an outside end of the coil 18. One end of a lead conductor18 b is electrically connected to an inside end of the coil 18.

The lead conductors 18 a, 18 b are disposed mainly on the torsion barportions 14, on the first movable portion 81, and on one torsion barportion 10 and extend from the second movable portion 82 to the othertorsion bar portion 10. The other ends of the lead conductors 18 a, 18 bare electrically connected to respective electrodes 19 a, 19 b disposedon the surface of the support portion 6. The electrodes 19 a, 19 b areelectrically connected to the aforementioned unshown control circuit orthe like. The lead conductors 18 a, 18 b are grade-separated from thecoil 16 so as to pass above the coil 16.

Now, let us describe a configuration of each torsion bar portion 10,with reference to FIG. 4. FIG. 4 is a drawing for illustrating theconfiguration of the torsion bar portion.

As shown in FIG. 4, each torsion bar portion 10 includes a plurality ofstraight sections 10 a (nine straight sections 10 a ₁ to 10 a ₉ in thepresent embodiment), a plurality of turnover sections 10 b (eightturnover sections 10 b ₁ to 10 ₈ in the present embodiment), and a pairof connection sections 10 c, 10 d. The straight sections 10 a ₁ to 10 a₉ extend in a first direction along the swing axis L of the torsion barportion 10 and are juxtaposed in a second direction intersecting withthe first direction. The turnover sections 10 b ₁ to 10 b ₈ are providedso as to extend in the second direction. In the present embodiment, thefirst direction and the second direction intersect at right angles.

The turnover sections 10 b ₁ to 10 b ₈ couple ends of two straightsections 10 a ₁ to 10 a ₉ adjacent in the second direction, out of thestraight sections 10 a ₁ to 10 a ₉. For example, one ends of therespective straight sections 10 a ₁ and 10 a ₂ are coupled to theturnover section 10 b ₁. In this way, the turnover sections 10 b ₁ to 10b ₈ alternately couple the two ends of the straight sections 10 a ₂ to10 a ₈. In the present embodiment, the turnover sections 10 b ₁, 10 b ₂,10 b ₇, and 10 b ₈ are straight and the turnover sections 10 b ₃ to 10 ₆are curved.

The other end of the straight section 10 a ₁ is coupled to one end ofthe connection section 10 d. The straight section 10 a ₁ is one of thestraight sections located outermost in the second direction out of thestraight sections 10 a ₁ to 10 a ₉. The other end of the connectionsection 10 d is coupled to the movable portion 8 at a connection point11 b. Namely, the connection section 10 d is connected to the straightsection 10 a ₁ and to the movable portion 8.

One end of the straight section 10 a ₉ is coupled to one end of theconnection section 10 c. The straight section 10 a ₉ is the other of thestraight sections located outermost in the second direction out of thestraight sections 10 a ₁ to 10 a ₉. The other end of the connectionsection 10 d is coupled to the support portion 6 at a connection point11 a. Namely, the connection section 10 c is connected to the straightsection 10 a ₉ and to the support portion 6.

The torsion bar portion 10 includes the straight sections 10 a ₁ to 10 a₉, the turnover sections 10 b ₁ to 10 b ₈, and the connection sections10 c, 10 d. This makes the torsion bar portion 10 of the meanderingshape. The connection points 11 a, 11 b are located on a virtual lineextending in a direction along the swing axis L. The virtual line passesthrough a central region in the second direction of the torsion barportion 10.

Next, let us describe the wiring 20 disposed on the torsion bar portion10, with reference to FIGS. 5 to 10. FIG. 5 is a drawing forillustrating a cross-sectional configuration along the line V-V in FIG.4. FIG. 6 is a drawing for illustrating a cross-sectional configurationalong the line VI-VI in FIG. 4. FIG. 7 is a drawing for illustrating across-sectional configuration along the line VII-VII in FIG. 4. FIG. 8is a drawing for illustrating a cross-sectional configuration along theline VIII-VIII in FIG. 4. FIG. 9 is a drawing for illustrating across-sectional configuration along the line IX-IX in FIG. 4. FIG. 10 isa drawing for illustrating a cross-sectional configuration along theline X-X in FIG. 4.

The wiring 20 constitutes sections disposed on the corresponding torsionbar portions 10, of the lead conductors 16 a, 16 b, 18 a, 18 b. Namely,the lead conductors 16 a, 16 b, 18 a, 18 b include the wiring 20. Thewiring 20 includes wiring sections 21, wiring sections 22, and wiringsections 23. The wiring sections 21 are disposed on the turnoversections 10 b (10 b ₁ to 10 b ₈). The wiring sections 22 are disposedmainly on the straight sections 10 a (10 a ₁ to 10 a ₉). The wiringsections 23 are disposed on the connection sections 10 c, 10 d. Thewiring sections 23 disposed on the connection section 10 c areconfigured in the same configuration as the wiring sections 23 disposedon the connection section 10 d. For this reason, the cross-sectionalconfiguration of the wiring sections 23 is shown for only the wiringsections 23 disposed on the connection section 10 d, while omitting theillustration of the cross-sectional configuration of the wiring sections23 disposed on the connection section 10 c.

The wiring sections 21, as also shown in FIGS. 7 to 9, are disposed soas to be embedded in grooves 25 a formed in the turnover sections 10 b.The wiring sections 21 are made of a first metal material including Cuand are formed by the damascene process. Namely, the wiring sections 21include damascene wiring sections. The grooves 25 a are formed byetching the turnover sections 10 b. The thickness of the torsion barportion 10 can be set, for example, approximately in the range of 20 μmto 60 μm. The depth of the grooves 25 a can be set, for example,approximately in the range of 5 μm to 15 μm.

The wiring sections 22, as shown in FIGS. 5 and 6, are disposed on thestraight sections 10 a. Specifically, the wiring sections 22 aredisposed in an insulating layer 26 disposed on one principal face of thetorsion bar portion 10. The insulating layer 26 is configured so as topartly cover the wiring sections 22. The insulating layer 26 is athermally-oxidized film obtained by thermally oxidizing the torsion barportion 10. The insulating layer 26 is made, for example, of siliconoxide (SiO₂). The thickness of the insulating layer can be set, forexample, to approximately 0.5 μm.

The wiring sections 22 are made of a metal material more resistant toplastic deformation than Cu as the first metal material. The metalmaterial constituting the wiring sections 22 is a metal material moreresistant to plastic deformation than Cu; e.g., the metal material is Alor an alloy containing Al. Examples of the alloy containing Al includean Al—Si alloy, an Al—Cu alloy, an Al—Si—Cu alloy, and so on. Acomposition ratio of the Al—Si alloy can be, for example, Al 99% and Si1%. A composition ratio of the Al—Cu alloy can be, for example, Al 99%and Cu 1%. A composition ratio of the Al—Si—Cu alloy can be, forexample, Al 98%, Si 1%, and Cu 1%. When one of the foregoing metalmaterials is adopted as the metal material constituting the wiringsections 22, the plastic deformation of the wiring sections 22 can berestrained quite well.

The wiring sections 22 include sections 22 a located on the wiringsections 21, as shown in. FIGS. 7 to 9. The sections 22 a of the wiringsections 22 are disposed on the wiring sections 21 so as to coveropenings of the grooves 25 a. The sections 22 a of the wiring sections22 are connected to the wiring sections 21.

As shown in FIG. 7, the wiring sections 21 disposed on the turnoversections 10 b are connected to the sections 22 a of the wiring sections22 and the wiring sections 23 disposed on the connection section 10 dare connected to sections 22 b of the wiring sections 22. In the wiringsections 22 disposed on the straight sections 10 a ₁, as shown in FIG.8, the sections 22 a of the wiring sections 22 are connected to thewiring sections 21. The wiring sections 21 are wiring formed by thedamascene process. The wiring sections 22 are made, for example, of Alor the alloy containing Al. FIGS. 7 and 8 show changeover regionsbetween the wiring sections 22 disposed on the straight sections 10 aand the wiring sections 21 disposed on the turnover sections 10 b, inthe wiring 20.

The wiring sections 23, as also shown in FIG. 10, are disposed so as tobe embedded in grooves 25 b formed in the connection section 10 d (10c). The wiring sections 23 are made of the first metal materialincluding Cu and formed by the damascene process. Namely, the wiringsections 23 also include damascene wiring sections. The grooves 25 b areformed by etching the connection section 10 d (10 c). The depth of thegrooves 25 b can be set, for example, approximately in the range of 5 μmto 15 μm.

The wiring sections 22 include sections 22 b located on the wiringsections 23, as shown in FIG. 10. The sections 22 b of the wiringsections 22 are disposed on the wiring sections 23 so as to coveropenings of the grooves 25 b. The sections 22 b of the wiring sections22 are connected to the wiring sections 23.

In the present embodiment, the magnetic field generating portion 4generates a magnetic field with flow of an electric current through thecoil 16 and the magnetic field thus generated exerts the Lorentz forcein a predetermined direction on electrons flowing in the coil 16. Forthis reason, the coil 16 is subject to the force in the predetermineddirection. By controlling the direction and magnitude of the electriccurrent flowing through the coil 16, the first movable portion 81 swingsaround the swing axis of the torsion bar portions 10. Namely, the firstmovable portion 81 rotates back and forth around the rotational axis ofthe torsion bar portions 10. With flow of an electric current throughthe coil 18, the magnetic field generating portion 4 generates amagnetic field and the magnetic field thus generated exerts the Lorentzforce in a predetermined direction on electrons flowing in the coil 18.For this reason, the coil 18 is subject to the force in thepredetermined direction. By controlling the direction and magnitude ofthe electric current flowing through the coil 18, the second movableportion 82 swings around the swing axis of the torsion bar portions 14.Namely, the second movable portion 82 rotates back and forth around therotational axis of the torsion bar portions 14. Accordingly, the mirrorarrangement portion 83 (minor 3) can be swung around each of the twoorthogonal swing axes by controlling each of the directions, magnitudes,and so on of the electric currents through the coil 16 and through thecoil 18.

Incidentally, when the movable portion 8 (first movable portion 81)swings around the swing axis of the torsion bar portions 10, in eachtorsion bar portion 10, high stress is exerted on the straight sections10 a extending in the direction along the swing axis of the torsion barportion 10, as shown in FIG. 11. FIG. 11 is a drawing for illustrating astate of the stress generated in the torsion bar portion 10. FIG. 11shows the result of a simulation of the stress in the torsion barportion 10 on the assumption that the support portion 6 is asubstantially rectangular parallelepiped shape and that the movableportion 8 (first movable portion 81) is a substantially rectangular flatplate shape. It proved that the high stress is exerted on regionsindicated in black in the straight sections 10 a extending in thedirection along the swing axis of the torsion bar portion 10.

In the present embodiment, the wiring sections 22 disposed on thestraight sections 10 a are made of Al or the alloy containing Al. Forthis reason, the wiring sections 22 are restrained from plasticdeformation even in the case where the high stress is exerted on thestraight sections 10 a. Therefore, it is feasible to prevent the wiring20 disposed on the torsion bar portions 10 from inhibiting the swingmotion of the movable portion 8 (first movable portion 81).

In the present embodiment, the wiring sections 21 disposed on theturnover sections 10 b are the damascene wiring sections made of Cu. Forthis reason, it is feasible to achieve reduction in resistance of thewiring 20 disposed on the torsion bar portions 10.

In the present embodiment, not only the wiring sections 21 but also thewiring sections 23 disposed on the connection sections 10 e, 10 d arethe damascene wiring sections made of Cu. For this reason, even in thecase where the wiring 20 includes the wiring sections 23, increase inresistance of the wiring is suppressed. As a result, it is feasible tosurely achieve reduction in resistance of the wiring 20. The high stressis unlikely to be exerted on the connection sections 10 c, 10 d, asshown in FIG. 11. Therefore, even if the wiring sections 23 disposed onthe connection sections 10 c, 10 d are the damascene wiring sectionsmade of Cu, the possibility of inhibiting the swing motion of themovable portion 8 (first movable portion 81) is also very low.

The wiring sections 21, 23 are the damascene wiring sections asdescribed above. For this reason, the corner edges located on thesurface side of the turnover portions 10 b and connection portions 10 c,10 d may be locally thinned so as to reduce the sectional area becauseof steps in their manufacturing process: The decrease in sectional areaof the wiring sections 21, 23 leads to increase in total resistance ofthe wiring 20. However, since the wiring sections 22 include thesections 22 a, 22 b disposed on the wiring sections 21, 23, the increasein resistance of the wiring 20 can be prevented even if the wiringsections 21, 23 are thinned.

In the present embodiment, the aforementioned sections 22 a, 22 b aredisposed so as to cover the openings of the grooves 25 a, 25 b. For thisreason, Cu of the wiring sections 21, 23 is less likely to diffuse intothe insulating layer 26. This suppresses occurrence of a short circuitbetween the metal materials constituting the wiring sections 21, 23 (Cuin the present embodiment).

In the present embodiment, the connection points 11 a, 11 b are locatedon the virtual line extending in the first direction and passing throughthe central region in the second direction of the torsion bar portion10. The resonance frequency of the torsion bar portion 10 is determinedby the width of the torsion bar portion 10 and the length in the firstdirection of the torsion bar portion 10. A conceivable configuration todecrease the stress exerted on the straight sections 10 a is to increasethe number of straight sections 10 a. The straight sections 10 a are notjuxtaposed in the first direction along the swing axis L but juxtaposedin the second direction intersecting with the first direction. For thisreason, there is no change in the length in the first direction of thetorsion bar portion 10, even with increase in the number of straightsections 10 a in the straight direction. Therefore, it facilitatesdesign of the torsion bar portion 10 for setting the resonance frequencyof the torsion bar portion 10 to a desired value.

In the present embodiment, the resistance of the turnover sections 10 bis higher than that of the straight sections 10 a, because of theirshape. For this reason, increase in the total resistance of the torsionbar portion 10 can be suppressed by disposing the wiring sections 21formed by the damascene process, on the turnover sections 10 b anddisposing the wiring sections 22 on the straight sections 10 a.

In the present embodiment, the wiring sections 22 disposed on thestraight sections 10 a (straight sections 10 a ₁ to 10 a ₉) are made ofAl or the alloy containing Al, but they do not have to be limited onlyto it. For example, as shown in FIGS. 12 and 13, the wiring sections 22do not have to be disposed on all of the straight sections 10 a. FIG. 12is a drawing for illustrating a modification example of theconfiguration of the wiring, which corresponds to the cross-sectionalconfiguration along the line V-V in FIG. 4. FIG. 13 is a drawing forillustrating the modification example of the configuration of thewiring, which corresponds to the cross-sectional configuration along theline VI-VI in FIG. 4.

As shown in FIGS. 12 and 13, the wiring sections 21 formed by thedamascene process may be disposed on the straight sections 10 a ₁, 10 a₉ located outermost in the second direction out of the straight sections10 a. As shown in FIG. 11, the stress exerted on the straight sections10 a ₁, 10 a ₉ is lower than that exerted on the other straight sections(10 a ₂ to 10 a ₈). For this reason, even in the case where the wiringsections 21 are disposed on the straight sections 10 a ₁, 10 a ₉, thewiring sections 21 disposed on the straight sections 10 a ₁, 10 a ₉ areless likely to undergo plastic deformation. When the wiring sections 21are disposed on the straight sections 10 a ₁, 10 a ₉, the resistance ofthe wiring 20 can be further reduced.

The wiring sections 21 may also be disposed on the straight sections 10a ₂, 10 a ₈. As shown in FIG. 11, the stress exerted on the straightsections 10 a ₁, 10 a ₂, 10 a ₈, 10 a ₉ located outside in the seconddirection out of the straight sections 10 a is lower than that exertedon the straight sections 10 a ₃ to 10 a ₇ closer to the swing axis L.For this reason, even in the case where the wiring sections 21 aredisposed on the straight sections 10 a ₁, 10 a ₂, 10 a ₈, 10 a ₉, thewiring sections 21 disposed on the straight sections 10 a ₁, 10 a ₂, 10a ₈, 10 a ₉ are less likely to undergo plastic deformation. When thewiring sections 21 are disposed on the straight sections 10 a ₁, 10 a ₂,10 a ₈, 10 a ₉, the resistance of the wiring 20 can be further reduced,

The embodiment of the present invention has been described above, but itshould be noted that the present invention is not always limited to theforegoing embodiment but can be modified.

In the aforementioned embodiment, the turnover sections 10 b ₁, 10 b ₂,10 b ₇, and 10 b ₈ were straight while the turnover sections 10 b ₃ to10 ₆ were curved, but they do not have to be limited to this. Theturnover sections 10 b all may be straight, or, all may be curved. Theturnover sections 10 b may be an arbitrary combination of straight andcurved shapes or may be different shapes.

In the foregoing embodiment, the torsion bar portion 10 was of themeandering shape consisting of the nine straight sections 10 a (10 a ₁to 10 a ₉) and eight turnover sections 10 b (10 b ₁ to 10 b ₈), but thenumbers of straight sections 10 a and turnover sections 10 b do not haveto be limited to them.

The above embodiment was described using the example where the mirror 3and mirror arrangement portion 83 were of the circular shape, but theshape of the mirror 3 and mirror arrangement portion 83 may be, forexample, a polygonal shape or an elliptical shape or the like.

The actuator device 2 may be an actuator device for driving a memberexcept for the mirror 3.

The above embodiment had the configuration in which only the torsion barportions 10 were of the meandering shape and the wiring 20 was disposedon the torsion bar portions 10, but the present invention does not haveto be limited only to it. For example, the torsion bar portions 10, 14may be of the meandering shape and the wiring 20 may be disposedthereon. Only the torsion bar portions 14 may be of the meandering shapeand the wiring 20 may be disposed on the torsion bar portions 14.

More preferably, the torsion bar portions 10 are of the meandering shapeand the wiring 20 is disposed on the torsion bar portions 10. The stresson the torsion bar portions 14 is stress exerted during the swing motionof the second movable portion 82. The stress on the torsion bar portions10 is stress exerted during the swing motion of the first movableportion 81 and the second movable portion 82. Namely, the stress on thetorsion bar portions 14 is lower than that on the torsion bar portions10. For this reason, the torsion bar portions 14 are less likely to posethe problem due to the stress than the torsion bar portions 10.Therefore, the structure of the torsion bar portions 14 can be thesimple configuration, which can increase a yield in manufacture of theactuator device 2.

In the present embodiment, the movable portion 8 is configured so as tobe driven in the two axis directions, the swing axis of the torsion barportions 10 and the swing axis of the torsion bar portions 14, but thepresent invention is not limited only to it. For example, the actuatordevice 2 may be configured so as to be driven by one coil disposed on amovable portion. The actuator device 2 may be preferably configured sothat the lead conductors are disposed on the pair of respective torsionbar portions. Since the lead conductors are disposed on the torsion barportions, whether the torsion bar portions are damaged can be known bythe presence or absence of an electric current flowing in the leadconductors. The actuator device 2 may be configured by adopting aconfiguration in which the operation of the actuator device is suspendedwith detection of the damage.

In the case where the lead conductors are disposed on the pair ofrespective torsion bar portions, the number of grooves formed in thetorsion bar portions is smaller than in the case where the leadconductors are disposed on only one torsion bar portion of the pair oftorsion bar portions. For this reason, the stress on the torsion barportions can be reduced. Furthermore, since the wiring disposed on eachtorsion bar portion is one wire, it can prevent a short circuit betweenwires.

In the present embodiment, the swing motion (drive) of the movableportion 8 is implemented by electromagnetic force, but the presentinvention does not have to be limited only to it. For example, the swingmotion (drive) of the movable portion 8 may be implemented by apiezoelectric device. In this case, the wiring 20 is used as wiring forapplying a voltage to the piezoelectric device.

REFERENCE SIGNS LIST

1 mirror driving device; 2 actuator device; 3 mirror; 4 magnetic fieldgenerating portion; 6 support portion; 8 movable portion; 10, 14 torsionbar portions; 10 a (10 a ₁ to 10 a ₉) straight sections; 10 b (10 b ₁ to10 b ₈) turnover sections; 10 c, 10 d connection sections; 16, 18 coils;20 wiring; 21, 22, 23 wiring sections; L swing axis.

1-9. (canceled) 10: An actuator device comprising: a support portion; afirst movable portion; and a first torsion bar portion coupling thefirst movable portion, to the support portion to be swingable around a.first swing axis, wherein the torsion bar portion is of a meanderingshape including a plurality of straight sections extending in a firstdirection along the first swing axis and juxtaposed in a seconddirection intersecting with the first direction, and a plurality ofturnover sections alternately coupling two ends of the straightsections, and the plurality of turnover sections have a curved shape.11: The actuator device according to claim 10, wherein the plurality ofstraight sections includes a first straight section disposed on thefirst swing axis, at least one second straight section disposed on oneside of the first straight section in the second direction, and at leastone third straight section disposed on another side of the firststraight section in the second direction, and the numbers of the secondstraight section and the third straight section are the same.
 12. Theactuator device according to claim 10, wherein the turnover sectionlocated near the first swing axis has a larger curvature than theturnover section located away from the first swing axis.
 13. Theactuator device according to claim 10, wherein the first torsion barportion includes a first connection section that connects the supportportion to one straight section located outermost in the seconddirection out of the plurality of straight sections, and a secondconnection section that connects the movable section to the otherstraight section located outermost in the second direction out of theplurality of straight sections, and a portion of the first connectionsection that opposes the corresponding turnover section has a curvedshape, and a portion of the second connection section that opposes thecorresponding turnover section has a curved shape.
 14. The actuatordevice according to claim 10, further comprising: a second movableportion; and a second torsion bar portion that couples the secondmovable portion to the first movable portion to be swingable around asecond swing axis intersecting with the first swing axis.
 15. Theactuator device according to claim 14, wherein the second torsion barportion and the second movable portion are coupled in a curved manner.16. The actuator device according to claim 14, further comprising: amirror arrangement portion coupled to the second movable portion atleast in, a direction orthogonal to the second swing axis.
 17. Theactuator device according to claim 14, wherein the second movableportion includes a first portion extending in a direction orthogonal tothe second swing axis and a second portion extending in a directionparallel to the second swing axis, and a width of the first portion inthe direction parallel to the second swing axis is larger than a widthof the second portion in the direction orthogonal to the second swingaxis.